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dc.contributor.author
Kopitkovas, G.
dc.contributor.author
Lippert, Thomas
dc.contributor.author
David, C.
dc.contributor.author
Wokaun, Alexander
dc.contributor.author
Gobrecht, J.
dc.date.accessioned
2017-06-11T11:39:48Z
dc.date.available
2017-06-11T11:39:48Z
dc.date.issued
2004-04
dc.identifier.issn
0040-6090
dc.identifier.issn
1879-2731
dc.identifier.other
10.1016/j.tsf.2003.11.074
dc.identifier.uri
http://hdl.handle.net/20.500.11850/87506
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Wet etching
dc.subject
Micro lens
dc.subject
Laser ablation
dc.subject
CaF2
dc.subject
BaF2
dc.subject
Sapphire
dc.title
Surface micromachining of UV transparent materials
dc.type
Conference Paper
ethz.book.title
Proceedings of Symposium H on Photonic Processing of Surfaces, Thin Films and Devices, of the E-MRS 2003 Spring Conference
ethz.journal.title
Thin Solid Films
ethz.journal.volume
453-454
ethz.journal.abbreviated
Thin solid films (Print)
ethz.pages.start
31
ethz.pages.end
35
ethz.event
Symposium H on Photonic Processing of Surfaces, Thin Films and Devices, of the E-MRS 2003 Spring Conference
ethz.event.location
Strasbourg, France
ethz.event.date
June 10-13, 2003
ethz.notes
Available online 12 February 2004.
ethz.identifier.nebis
000056364
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02513 - Laboratorium für Anorganische Chemie / Laboratory of Inorganic Chemistry
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02020 - Dep. Chemie und Angewandte Biowiss. / Dep. of Chemistry and Applied Biosc.::02516 - Inst. f. Chemie- und Bioingenieurwiss. / Inst. Chemical and Bioengineering::03421 - Wokaun, Alexander (emeritus)
ethz.date.deposited
2017-06-11T11:40:14Z
ethz.source
ECIT
ethz.identifier.importid
imp59365227c97c831692
ethz.ecitpid
pub:137599
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-15T04:13:39Z
ethz.rosetta.lastUpdated
2018-04-01T05:39:56Z
ethz.rosetta.exportRequired
true
ethz.rosetta.versionExported
true
ethz.COinS
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