Exact 3D simulation of Scanning Electron Microscopy images of semiconductor devices in the presence of electric and magnetic fields
- Journal Article
Journal / seriesMicroelectronics Reliability
Pages / Article No.
SubjectScanning Electron Microscopy; Monte Carlo simulation; Electron tracking; Technology computer-aided design
Organisational unit03380 - Huang, Qiuting / Huang, Qiuting
NotesReceived 26 June 2014, Accepted 8 July 2014, Available online 14 August 2014.
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