Clean and Stable LPP Light Source for HVM Inspection Applications
dc.contributor.author
Rollinger, Bob
dc.contributor.author
Gambino, Nadia
dc.contributor.author
Giovannini, Andrea Z.
dc.contributor.author
Bozinova, Luna S.
dc.contributor.author
Alickaj, Flori
dc.contributor.author
Hertig, Konrad
dc.contributor.author
Abhari, Reza S.
dc.date.accessioned
2017-06-11T12:00:04Z
dc.date.available
2017-06-11T12:00:04Z
dc.date.issued
2014-04
dc.identifier.issn
0277-786X
dc.identifier.other
10.1117/12.2046416
dc.identifier.uri
http://hdl.handle.net/20.500.11850/88217
dc.language.iso
en
dc.publisher
SPIE
dc.subject
EUV source
dc.subject
LPP
dc.subject
EUVL
dc.subject
Optical lithography
dc.subject
Droplets
dc.subject
Tin
dc.title
Clean and Stable LPP Light Source for HVM Inspection Applications
dc.type
Conference Paper
ethz.book.title
Extreme Ultraviolet (Euv) Lithography V
ethz.journal.title
Proceedings of SPIE
ethz.journal.volume
9048
ethz.journal.abbreviated
Proc. SPIE Int. Soc. Opt. Eng.
ethz.pages.start
90482K-1
ethz.pages.end
90482K-9
ethz.size
9 p.
ethz.event
Conference on Extreme Ultraviolet (EUV) Lithography V
ethz.event.location
San Jose, CA, USA
ethz.event.date
February 24-27, 2014
ethz.identifier.wos
ethz.publication.place
Bellingham, WA
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-11T12:00:31Z
ethz.source
ECIT
ethz.identifier.importid
imp5936523735db553526
ethz.ecitpid
pub:138815
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T16:29:46Z
ethz.rosetta.lastUpdated
2024-02-01T22:07:00Z
ethz.rosetta.versionExported
true
ethz.COinS
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