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dc.contributor.author
Gambino, Nadia
dc.contributor.author
Brandstätter, Markus
dc.contributor.author
Rollinger, Bob
dc.contributor.author
Abhari, Reza S.
dc.contributor.editor
Wood, Obert R.
dc.contributor.editor
Panning, Eric M.
dc.date.accessioned
2017-06-11T12:00:05Z
dc.date.available
2017-06-11T12:00:05Z
dc.date.issued
2014
dc.identifier.issn
0277-786X
dc.identifier.other
10.1117/12.2046378
dc.identifier.uri
http://hdl.handle.net/20.500.11850/88218
dc.language.iso
en
dc.publisher
SPIE
dc.subject
Laser Plasma
dc.subject
Langmuir Probe
dc.subject
Droplet Target
dc.subject
EUV Lithography
dc.title
Temporal and spatial dynamics of a laser-produced plasma through a multiple Langmuir probe detector
dc.type
Conference Paper
ethz.book.title
Extreme Ultraviolet (EUV) Lithography V
ethz.journal.title
Proceedings of SPIE
ethz.journal.volume
9048
ethz.journal.abbreviated
Proc. SPIE Int. Soc. Opt. Eng.
ethz.pages.start
90482I
ethz.size
8 p.
ethz.event
Conference on Extreme Ultraviolet (EUV) Lithography V
ethz.event.location
San Jose, CA, USA
ethz.event.date
February 24-27, 2014
ethz.identifier.wos
ethz.identifier.nebis
004705004
ethz.publication.place
Bellingham, WA
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-11T12:00:31Z
ethz.source
ECIT
ethz.identifier.importid
imp593652373b63e92004
ethz.ecitpid
pub:138816
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-17T07:44:03Z
ethz.rosetta.lastUpdated
2021-02-14T12:01:44Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Temporal%20and%20spatial%20dynamics%20of%20a%20laser-produced%20plasma%20through%20a%20multiple%20Langmuir%20probe%20detector&rft.jtitle=Proceedings%20of%20SPIE&rft.date=2014&rft.volume=9048&rft.spage=90482I&rft.issn=0277-786X&rft.au=Gambino,%20Nadia&Brandst%C3%A4tter,%20Markus&Rollinger,%20Bob&Abhari,%20Reza%20S.&rft.genre=proceeding&rft_id=info:doi/10.1117/12.2046378&rft.btitle=Extreme%20Ultraviolet%20(EUV)%20Lithography%20V
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