Sidewall roughness measurement inside photonic crystal holes by atomic force microscopy

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Author
Strasser, P.
Robin, F.
Carlström, C. F.
Wüest, R.
Kappeler, R.
Jäckel, H.
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Date
2007
Type
    Journal Article
Publication status
published
External links
Journal / series
Nanotechnology
Volume
18(40)
Pages / Article No.
405703
Publisher
Institute of Physics
Organisational unit
03386 - Jäckel, Heinz  
Notes
Received 21 June 2007, in final form 30 July 2007. Published 17 September 2007.
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yes
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