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dc.contributor.author
Strasser, P.
dc.contributor.author
Robin, F.
dc.contributor.author
Carlström, C. F.
dc.contributor.author
Wüest, R.
dc.contributor.author
Kappeler, R.
dc.contributor.author
Jäckel, H.
dc.date.accessioned
2017-06-08T18:19:53Z
dc.date.available
2017-06-08T18:19:53Z
dc.date.issued
2007
dc.identifier.other
10.1088/0957-4484/18/40/405703
dc.identifier.uri
http://hdl.handle.net/20.500.11850/8837
dc.language.iso
en
dc.publisher
Institute of Physics
dc.title
Sidewall roughness measurement inside photonic crystal holes by atomic force microscopy
dc.type
Journal Article
ethz.journal.title
Nanotechnology
ethz.journal.volume
18
ethz.journal.issue
40
ethz.pages.start
405703
ethz.size
5 p.
ethz.notes
Received 21 June 2007, in final form 30 July 2007. Published 17 September 2007.
ethz.identifier.nebis
000552937
ethz.publication.place
Bristol
ethz.publication.status
published
ethz.leitzahl
03386 - Jäckel, Heinz
ethz.leitzahl.certified
03386 - Jäckel, Heinz
ethz.date.deposited
2017-06-08T18:20:03Z
ethz.source
ECIT
ethz.identifier.importid
imp59364bcf3604388292
ethz.ecitpid
pub:19640
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T08:03:48Z
ethz.rosetta.lastUpdated
2020-02-14T05:07:37Z
ethz.rosetta.versionExported
true
ethz.COinS
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