Influence of proximity effects in electron-beam lithograpy on the optical properties of planar photonic-crystal waveguides

Thumbnail
Metadata only
Author
Wüest, R.
Robin, F.
Strasser, P.
Jäckel, H.
Erni, D.
Show all
Date
2007
Type
    Journal Article
Publication status
published
External links
Journal / series
Journal of Applied Physics
Volume
102(8)
Pages / Article No.
083110
Publisher
American Institute of Physics
Organisational unit
03386 - Jäckel, Heinz  
Notes
Received 13 June 2007, Accepted 3 September 2007, Published online 29 October 2007.
More
Show all metadata
ETH Bibliography
yes
Altmetrics