Focused ion beam iodine-enhanced etching of high aspect ratio holes in InP photonic crystals

Metadata only

Autor(in)

Datum

2007

Typ

Journal Article

ETH Bibliographie

yes

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Publikationsstatus

published

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Zeitschrift / Serie

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Band

25(6)

Seiten / Artikelnummer

2175 - 2179

Verlag

American Institute of Physics

Organisationseinheit

03386 - Jäckel, Heinz

Anmerkungen

Titelvariante: JVST B. Received 10 June 2007. Accepted 8 October 2007. Published 7 December 2007..

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ETH Bibliographie

yes

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Research Collection