Modeling Electrochemical Etching of Proton Irradiated p-GaAs for the Design of MEMS Building Blocks
- Journal Article
Journal / seriesJournal of microelectromechanical systems
Pages / Article No.
SubjectProton beam writing; Finite elements; GaAs; Electrochemical etching; MEMS
NotesManuscript received 19 November 2013, Accepted 12 January 2014, Date of publication 25 March 2014, Date of current version 29 July 2014.
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