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dc.contributor.author
Koppe, Tristan
dc.contributor.author
Rothfuchs, Charlotte
dc.contributor.author
Schulte-Borchers, Martina
dc.contributor.author
Hofsäss, Hans
dc.contributor.author
Boudinov, Henri
dc.contributor.author
Vetter, Ulrich
dc.date.accessioned
2017-06-11T12:46:03Z
dc.date.available
2017-06-11T12:46:03Z
dc.date.issued
2014-08
dc.identifier.issn
1057-7157
dc.identifier.issn
1941-0158
dc.identifier.other
10.1109/JMEMS.2014.2309178
dc.identifier.uri
http://hdl.handle.net/20.500.11850/90029
dc.language.iso
en
dc.publisher
IEEE
dc.subject
Proton beam writing
dc.subject
Finite elements
dc.subject
GaAs
dc.subject
Electrochemical etching
dc.subject
MEMS
dc.title
Modeling Electrochemical Etching of Proton Irradiated p-GaAs for the Design of MEMS Building Blocks
dc.type
Journal Article
ethz.journal.title
Journal of microelectromechanical systems
ethz.journal.volume
23
ethz.journal.issue
4
ethz.pages.start
955
ethz.pages.end
960
ethz.notes
Manuscript received 19 November 2013, Accepted 12 January 2014, Date of publication 25 March 2014, Date of current version 29 July 2014.
ethz.identifier.wos
ethz.identifier.nebis
000643917
ethz.publication.place
New York, NY
ethz.publication.status
published
ethz.date.deposited
2017-06-11T12:46:51Z
ethz.source
ECIT
ethz.identifier.importid
imp5936525b1a56569991
ethz.ecitpid
pub:141760
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-14T17:10:32Z
ethz.rosetta.lastUpdated
2017-07-14T17:10:32Z
ethz.rosetta.versionExported
true
ethz.COinS
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