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dc.contributor.author
Häfliger, Daniel
dc.contributor.supervisor
Stemmer, Andreas
dc.contributor.supervisor
Boisen, Anja
dc.contributor.supervisor
Poulikakos, Dimosthenis
dc.date.accessioned
2017-06-11T13:07:08Z
dc.date.available
2017-06-11T13:07:08Z
dc.date.issued
2003
dc.identifier.uri
http://hdl.handle.net/20.500.11850/90931
dc.identifier.doi
10.3929/ethz-a-004624792
dc.language.iso
en
dc.publisher
ETH Zürich
dc.rights.uri
http://rightsstatements.org/page/InC-NC/1.0/
dc.subject
LASERANWENDUNGEN (LASERTECHNIK)
dc.subject
ALUMINIUM (METALLURGY)
dc.subject
ERZEUGUNG DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN)
dc.subject
NANOSTRUKTURIERTE MATERIALIEN (PHYSIK DER KONDENSIERTEN MATERIE)
dc.subject
NANOSTRUCTURED MATERIALS (CONDENSED MATTER PHYSICS)
dc.subject
LASER APPLICATIONS (LASER ENGINEERING)
dc.subject
PRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS)
dc.subject
LITHOGRAPHIE + MIKROLITHOGRAPHIE + NANOLITHOGRAPHIE (MIKROELEKTRONIK)
dc.subject
LITHOGRAPHY + MICROLITHOGRAPHY + NANOLITHOGRAPHY (MICROELECTRONICS)
dc.subject
ALUMINIUM (METALLURGIE)
dc.title
Nano-scale patterning of aluminium films by water and light
dc.type
Doctoral Thesis
dc.rights.license
In Copyright - Non-Commercial Use Permitted
ethz.size
101 S.
ethz.code.ddc
5 - Science::530 - Physics
ethz.notes
Diss., Technische Wissenschaften ETH Zürich, Nr. 15144, 2003.
ethz.notes
.
ethz.identifier.diss
15144
ethz.identifier.nebis
004624792
ethz.publication.place
Zürich
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03444 - Stemmer, Andreas / Stemmer, Andreas
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::03444 - Stemmer, Andreas / Stemmer, Andreas
ethz.date.deposited
2017-06-11T13:07:52Z
ethz.source
ECOL
ethz.source
ECIT
ethz.identifier.importid
imp59366a74b141991329
ethz.identifier.importid
imp5936526ab772a95468
ethz.ecolpid
eth:26829
ethz.ecitpid
pub:142991
ethz.eth
yes
ethz.availability
Open access
ethz.rosetta.installDate
2017-07-13T06:43:50Z
ethz.rosetta.lastUpdated
2018-11-02T16:22:21Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Nano-scale%20patterning%20of%20aluminium%20films%20by%20water%20and%20light&rft.date=2003&rft.au=H%C3%A4fliger,%20Daniel&rft.genre=unknown&rft.btitle=Nano-scale%20patterning%20of%20aluminium%20films%20by%20water%20and%20light
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