Metadata only
Date
2014Type
- Journal Article
Publication status
publishedExternal links
Journal / series
Microelectronic EngineeringVolume
Pages / Article No.
Publisher
ElsevierSubject
Fluorinated alkyl monolayers; Anti-sticking layers; Nanoimprint lithography; Injection molding; Adhesion; DemoldingNotes
Received 17 October 2013, Received in revised form 28 February 2014, Accepted 26 March 2014, Available online 5 April 2014.More
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