Anti-sticking layers for nickel-based nanoreplication tools - Research Collection

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Author

Padeste, Celestino

Bellini, Sandro

Siewert, Dorota

Schift, Helmut

Date

2014

Type

Journal Article

Citations

Cited 4 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1016/j.mee.2014.03.039

Journal / series

Microelectronic Engineering

Volume

123

Pages / Article No.

23 - 27

Publisher

Elsevier

Subject

Fluorinated alkyl monolayers; Anti-sticking layers; Nanoimprint lithography; Injection molding; Adhesion; Demolding

Notes

Received 17 October 2013, Received in revised form 28 February 2014, Accepted 26 March 2014, Available online 5 April 2014.

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Citations

Cited 4 times in Web of Science

ETH Bibliography

yes

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