Metadata only
Datum
2014Typ
- Journal Article
Publikationsstatus
publishedExterne Links
Zeitschrift / Serie
Microelectronic EngineeringBand
Seiten / Artikelnummer
Verlag
ElsevierThema
Fluorinated alkyl monolayers; Anti-sticking layers; Nanoimprint lithography; Injection molding; Adhesion; DemoldingAnmerkungen
Received 17 October 2013, Received in revised form 28 February 2014, Accepted 26 March 2014, Available online 5 April 2014.