Anti-sticking layers for nickel-based nanoreplication tools - Research Collection

Metadata only

Autor(in)

Padeste, Celestino

Bellini, Sandro

Siewert, Dorota

Datum

2014

Typ

Journal Article

Zitate

4 Zitate in Web of Science

ETH Bibliographie

yes

Altmetrics

Publikationsstatus

published

Externe Links

https://doi.org/10.1016/j.mee.2014.03.039

Zeitschrift / Serie

Microelectronic Engineering

Band

123

Seiten / Artikelnummer

23 - 27

Verlag

Elsevier

Thema

Fluorinated alkyl monolayers; Anti-sticking layers; Nanoimprint lithography; Injection molding; Adhesion; Demolding

Anmerkungen

Received 17 October 2013, Received in revised form 28 February 2014, Accepted 26 March 2014, Available online 5 April 2014.

Mehr

Alle Metadaten anzeigen

Zitate

4 Zitate in Web of Science

ETH Bibliographie

yes

Altmetrics