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dc.contributor.author
Padeste, Celestino
dc.contributor.author
Bellini, Sandro
dc.contributor.author
Siewert, Dorota
dc.contributor.author
Schift, Helmut
dc.date.accessioned
2017-06-11T13:43:36Z
dc.date.available
2017-06-11T13:43:36Z
dc.date.issued
2014
dc.identifier.issn
0167-9317
dc.identifier.issn
1873-5568
dc.identifier.other
10.1016/j.mee.2014.03.039
dc.identifier.uri
http://hdl.handle.net/20.500.11850/92312
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Fluorinated alkyl monolayers
dc.subject
Anti-sticking layers
dc.subject
Nanoimprint lithography
dc.subject
Injection molding
dc.subject
Adhesion
dc.subject
Demolding
dc.title
Anti-sticking layers for nickel-based nanoreplication tools
dc.type
Journal Article
ethz.journal.title
Microelectronic Engineering
ethz.journal.volume
123
ethz.journal.abbreviated
Microelectron. eng.
ethz.pages.start
23
ethz.pages.end
27
ethz.notes
Received 17 October 2013, Received in revised form 28 February 2014, Accepted 26 March 2014, Available online 5 April 2014.
ethz.identifier.wos
ethz.identifier.nebis
000022878
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.date.deposited
2017-06-11T13:44:19Z
ethz.source
ECIT
ethz.identifier.importid
imp593652852905d42575
ethz.ecitpid
pub:145349
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-19T01:44:39Z
ethz.rosetta.lastUpdated
2018-08-02T15:13:19Z
ethz.rosetta.versionExported
true
ethz.COinS
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