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dc.contributor.author
Spillmann, Adrian
dc.contributor.author
Sonnenfeld, Axel
dc.contributor.author
Rudolf von Rohr, Philipp
dc.date.accessioned
2017-06-08T18:29:16Z
dc.date.available
2017-06-08T18:29:16Z
dc.date.issued
2008
dc.identifier.issn
0169-4332
dc.identifier.issn
1873-5584
dc.identifier.other
10.1016/j.apsusc.2008.06.121
dc.identifier.uri
http://hdl.handle.net/20.500.11850/9285
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Plasma-enhanced chemical vapor deposition (PECVD)
dc.subject
Particulate substrate
dc.subject
Powder flowability
dc.subject
Plasma down stream reactor
dc.subject
Gravimetric analysis
dc.subject
ATR-FTIR
dc.title
Gravimetrical and chemical characterization of SiOx structures deposited on fine powders by short plasma exposure in a plasma down stream reactor
dc.type
Journal Article
ethz.journal.title
Applied Surface Science
ethz.journal.volume
255
ethz.journal.issue
5
ethz.journal.abbreviated
Appl. surf. sci.
ethz.pages.start
1911
ethz.pages.end
1915
ethz.notes
Received 13 May 2008, revised 17 June 2008, accepted 18 June 2008, Available online 26 June 2008.
ethz.identifier.nebis
000031422
ethz.publication.place
Amsterdam
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-08T18:29:34Z
ethz.source
ECIT
ethz.identifier.importid
imp59364bd7a127c13084
ethz.ecitpid
pub:20158
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-15T15:20:40Z
ethz.rosetta.lastUpdated
2019-02-02T04:30:04Z
ethz.rosetta.versionExported
true
ethz.COinS
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