Design, fabrication and calibration of a silicon micro force-torque sensor

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Author
Beyeler, Felix
Muntwyler, Simon
Nelson, Bradley J.
Date
2008
Type
  • Conference Paper
Publication status
published
External links
http://www.iris.ethz.ch/msrl/publications/files/euspen_3dof_v03.pdf
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Editor
Brussel, Hendrik van
Book title
Proceedings of the 10th anniversary international conference of the European Society for Precision Engineering and Nanotechnology
Pages
273 - 276
Publisher
Euspen
Event
10th anniversary international conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN 2008), May 18-22, 2008
Organisational unit
03627 - Nelson, Bradley J.
Notes
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