On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-mu m-thick high aspect ratio ceramic MEMS
- Journal Article
Journal / seriesCeramics international
Pages / Article No.
SubjectPolymer derived ceramic; Micro-moulding; Capillary filling; Wetting angle
NotesReceived 3 July 2014, Revised 26 August 2014, Accepted 26 August 2014, Available online 2 September 2014.
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