
Open access
Author
Date
2014Type
- Doctoral Thesis
ETH Bibliography
yes
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Permanent link
https://doi.org/10.3929/ethz-a-010353008Publication status
publishedExternal links
Search print copy at ETH Library
Publisher
ETH ZürichSubject
MICROTECHNOLOGY; MICROMACHINING (MACHINING); PRODUCTION ENGINEERING; PRODUKTIONSTECHNIK; MIKROTECHNIK; MIKROBEARBEITUNG (SPANENDE UMFORMUNG)Organisational unit
02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.03641 - Wegener, Konrad / Wegener, Konrad
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ETH Bibliography
yes
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