Three-dimensional Monte Carlo modeling of critical dimension SEM metrology in a TCAD simulation environment

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Autor(in)
Ciappa, Mauro
Ilgünsatiroglu, Emre
Illarionov, Alexey Y.
Datum
2014
Typ
    Other Conference Item
Publikationsstatus
published
Zeitschrift / Serie
Proceedings of SPIE
Band
9236-39
Verlag
SPIE
Konferenz
SPIE Scanning Microscopies 2014, Monterey, CA, USA, September 16-18, 2014
Organisationseinheit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)  
Anmerkungen
Conference lecture on 18 September 2014.
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