Three-dimensional Monte Carlo modeling of critical dimension SEM metrology in a TCAD simulation environment

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Author
Ciappa, Mauro
Ilgünsatiroglu, Emre
Illarionov, Alexey Y.
Date
2014
Type
    Other Conference Item
Publication status
published
Journal / series
Proceedings of SPIE
Volume
9236-39
Publisher
SPIE
Event
SPIE Scanning Microscopies 2014, Monterey, CA, USA, September 16-18, 2014
Organisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)  
Notes
Conference lecture on 18 September 2014.
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