Three-dimensional Monte Carlo modeling of critical dimension SEM metrology in a TCAD simulation environment
dc.contributor.author
Ciappa, Mauro
dc.contributor.author
Ilgünsatiroglu, Emre
dc.contributor.author
Illarionov, Alexey Y.
dc.date.accessioned
2017-06-11T15:44:02Z
dc.date.available
2017-06-11T15:44:02Z
dc.date.issued
2014
dc.identifier.issn
0277-786X
dc.identifier.uri
http://hdl.handle.net/20.500.11850/97014
dc.language.iso
en
dc.publisher
SPIE
dc.title
Three-dimensional Monte Carlo modeling of critical dimension SEM metrology in a TCAD simulation environment
dc.type
Other Conference Item
ethz.journal.title
Proceedings of SPIE
ethz.journal.volume
9236-39
ethz.journal.abbreviated
Proc. SPIE Int. Soc. Opt. Eng.
ethz.event
SPIE Scanning Microscopies 2014
ethz.event.location
Monterey, CA, USA
ethz.event.date
September 16-18, 2014
ethz.notes
Conference lecture on 18 September 2014.
ethz.publication.place
Bellingham, WA
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02140 - Dep. Inf.technologie und Elektrotechnik / Dep. of Inform.Technol. Electrical Eng.::02636 - Institut für Integrierte Systeme / Integrated Systems Laboratory::03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
ethz.date.deposited
2017-06-11T15:44:31Z
ethz.source
ECIT
ethz.identifier.importid
imp593652daec42981463
ethz.ecitpid
pub:151905
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-15T03:26:10Z
ethz.rosetta.lastUpdated
2022-03-28T13:36:34Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Three-dimensional%20Monte%20Carlo%20modeling%20of%20critical%20dimension%20SEM%20metrology%20in%20a%20TCAD%20simulation%20environment&rft.jtitle=Proceedings%20of%20SPIE&rft.date=2014&rft.volume=9236-39&rft.issn=0277-786X&rft.au=Ciappa,%20Mauro&Ilg%C3%BCnsatiroglu,%20Emre&Illarionov,%20Alexey%20Y.&rft.genre=unknown&
Files in this item
| Files | Size | Format | Open in viewer |
|---|---|---|---|
|
There are no files associated with this item. |
|||
Publication type
-
Other Conference Item [19561]