Monte Carlo Modeling of the Extraction of Roughness Parameters at Nanometer Scale by Critical Dimension Scanning Electron Microscopy

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Author
Ciappa, M
Ilgünsatiroglu, E.
Illarionov, A.Yu.
Filosomi, F.
Santini, C.
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Date
2014
Type
  • Conference Paper
Publication status
published
External links
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Editor
Bez, Roberto
Pavan, Paolo
Meneghesso, Gaudenzio
Book title
Proceedings of the 44th European Solid State Device Research Conference (ESSDERC 2014)
Journal / series
European Solid State Device Research Conference. Proceedings
Pages / Article No.
357 - 360
Publisher
IEEE
Event
44th European Solid State Device Research Conference, ESSDERC 2014, Venezia, Italy, September 22-26, 2014
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo Modeling
Organisational unit
03380 - Huang, Qiuting / Huang, Qiuting  
Notes
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