Monte Carlo Modeling of the Extraction of Roughness Parameters at Nanometer Scale by Critical Dimension Scanning Electron Microscopy

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Author

Date

2014

Type

Conference Paper

ETH Bibliography

yes

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Publication status

published

External links

Editor

Book title

Proceedings of the 44th European Solid State Device Research Conference (ESSDERC 2014)

Journal / series

European Solid State Device Research Conference. Proceedings

Pages / Article No.

357 - 360

Publisher

IEEE

Event

44th European Solid State Device Research Conference, ESSDERC 2014, Venezia, Italy, September 22-26, 2014

Subject

Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo Modeling

Organisational unit

03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)

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ETH Bibliography

yes

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