Monte Carlo Modeling of the Extraction of Roughness Parameters at Nanometer Scale by Critical Dimension Scanning Electron Microscopy
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Date
2014Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
Proceedings of the 44th European Solid State Device Research Conference (ESSDERC 2014)Journal / series
European Solid State Device Research Conference. ProceedingsPages / Article No.
Publisher
IEEEEvent
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo ModelingOrganisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
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ETH Bibliography
yes
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