Monte Carlo Modeling of the Extraction of Roughness Parameters at Nanometer Scale by Critical Dimension Scanning Electron Microscopy

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Author
Ciappa, M
Ilgünsatiroglu, E.
Illarionov, A.Yu.
Filosomi, F.
Santini, C.
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Date
2014
Type
  • Conference Paper
Publication status
published
External links
Full text via SFX
Editor
Bez, Roberto
Pavan, Paolo
Meneghesso, Gaudenzio
Book title
Proceedings of the 44th European Solid State Device Research Conference (ESSDERC 2014)
Journal / series
European Solid State Device Research Conference. Proceedings
Pages
357 - 360
Publisher
IEEE
Event
44th European Solid State Device Research Conference, ESSDERC 2014, Venezia, Italy, September 22-26, 2014
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo Modeling
Organisational unit
03380 - Huang, Qiuting
Notes
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