Simulation of the Measurement by Scanning Electron Microscopy of Edge and Linewidth Roughness Parameters in Nanostructures
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Date
2015Type
- Conference Paper
ETH Bibliography
yes
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Publication status
publishedExternal links
Book title
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)Pages / Article No.
Publisher
IEEEEvent
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo ModelingOrganisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)
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ETH Bibliography
yes
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