Simulation of the Measurement by Scanning Electron Microscopy of Edge and Linewidth Roughness Parameters in Nanostructures

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Author
Ciappa, Mauro
Ilgünsatiroglu, Emre
Illarionov, Alexey Yu.
Date
2015
Type
  • Conference Paper
Publication status
published
External links
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Book title
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Pages / Article No.
205 - 208
Publisher
IEEE
Event
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Bologna, Italy, January 26-28, 2015
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo Modeling
Organisational unit
03380 - Huang, Qiuting  
Notes
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