Simulation of the Measurement by Scanning Electron Microscopy of Edge and Linewidth Roughness Parameters in Nanostructures

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Author
Ciappa, Mauro
Ilgünsatiroglu, Emre
Illarionov, Alexey Yu
Date
2015
Type
    Conference Paper
Publication status
published
External links
Book title
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Pages / Article No.
205 - 208
Publisher
IEEE
Event
2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Bologna, Italy, January 26-28, 2015
Subject
Metrology; Scanning Electron Microscopy; Critical Dimensions; Line Edge Roughness; Monte Carlo Modeling
Organisational unit
03380 - Huang, Qiuting (emeritus) / Huang, Qiuting (emeritus)  
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