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We report on the integration of single and small bundles of carbon nanotube (CNT) biosensors on a CMOS-integrated array featuring 1024 devices. The system has been designed to allow for direct and versatile readout of each nanosensor. A parallel integration of the CNT nanosensors has been achieved by using semi-sacrificial electrodes and dielectrophoresis (DEP). The developed sensing platform will be used for high-resolution chemical monitoring of complex biological systems. Here, we present the onchip CNT integration process and statistical analysis of the fabricated devices. Show more
Book title18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014)
Pages / Article No.
PublisherChemical and Biological Microsystems Society
SubjectCarbon nanotube; Nanosensors; CMOS; Dielectrophoresis
Organisational unit03684 - Hierlemann, Andreas / Hierlemann, Andreas
267351 - Seamless Integration of Neurons with CMOS Microelectronics (EC)
NotesPoster abstract. Poster presentation on October 28, 2014.
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