CMOS-integrated high-density arrays of carbon nanotube sensors

Abstract

We report on the integration of single and small bundles of carbon nanotube (CNT) biosensors on a CMOS-integrated array featuring 1024 devices. The system has been designed to allow for direct and versatile readout of each nanosensor. A parallel integration of the CNT nanosensors has been achieved by using semi-sacrificial electrodes and dielectrophoresis (DEP). The developed sensing platform will be used for high-resolution chemical monitoring of complex biological systems. Here, we present the onchip CNT integration process and statistical analysis of the fabricated devices.