Three-Dimensional Plasma Shape Effects on the EUV Emission Distribution in Laser Droplet Interactions
dc.contributor.author
Giovannini, A.Z.
dc.contributor.author
Abhari, Reza S.
dc.date.accessioned
2017-06-11T15:53:16Z
dc.date.available
2017-06-11T15:53:16Z
dc.date.issued
2014
dc.identifier.uri
http://hdl.handle.net/20.500.11850/97444
dc.language.iso
en
dc.publisher
SPIE
dc.title
Three-Dimensional Plasma Shape Effects on the EUV Emission Distribution in Laser Droplet Interactions
dc.type
Other Conference Item
ethz.book.title
2014 Advanced Lithography: Technical Program
ethz.pages.start
40
ethz.event
SPIE Advanced Lithography Conference
ethz.event.location
San Jose, CA, USA
ethz.event.date
February 23-27, 2014
ethz.notes
Conference Lecture on 26 February 2014. Conference 9048.
ethz.publication.status
unpublished
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02668 - Inst. f. Energie- und Verfahrenstechnik / Inst. Energy and Process Engineering::03548 - Abhari, Reza S. / Abhari, Reza S.
ethz.date.deposited
2017-06-11T15:53:29Z
ethz.source
ECIT
ethz.identifier.importid
imp593652e1a3b5f72206
ethz.ecitpid
pub:152395
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-13T15:38:13Z
ethz.rosetta.lastUpdated
2021-02-14T12:37:54Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=Three-Dimensional%20Plasma%20Shape%20Effects%20on%20the%20EUV%20Emission%20Distribution%20in%20Laser%20Droplet%20Interactions&rft.date=2014&rft.spage=40&rft.au=Giovannini,%20A.Z.&Abhari,%20Reza%20S.&rft.genre=unknown&rft.btitle=2014%20Advanced%20Lithography:%20Technical%20Program
Files in this item
| Files | Size | Format | Open in viewer |
|---|---|---|---|
|
There are no files associated with this item. |
|||
Publication type
-
Other Conference Item [17965]