Wafer-level flame-spray pyrolysis deposition of gas-sensitive layers on microsensors
Metadata only
Date
2008Type
- Journal Article
Publication status
publishedJournal / series
Journal of Micromechanics and MicroengineeringVolume
Pages / Article No.
Publisher
Institut of PhysicsOrganisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
03510 - Pratsinis, Sotiris E. / Pratsinis, Sotiris E.
Notes
Received 18 July 2007, In final form 15 January 2008, Published 20 February 2008.More
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