Wafer-level flame-spray pyrolysis deposition of gas-sensitive layers on microsensors - Research Collection

Metadata only

Author

Kuehne, S.

Graf, M.

Tricoli, Antonio

Mayer, F.

Pratsinis, Sotiris E.

Date

2008

Type

Journal Article

Citations

Cited 25 times in Web of Science

Cited 33 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1088/0960-1317/18/3/035040

Journal / series

Journal of Micromechanics and Microengineering

Volume

18(3)

Pages / Article No.

035040

Publisher

Institut of Physics

Organisational unit

03684 - Hierlemann, Andreas
03510 - Pratsinis, Sotiris E.

Notes

Received 18 July 2007, In final form 15 January 2008, Published 20 February 2008.

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Citations

Cited 25 times in Web of Science

Cited 33 times in Scopus

ETH Bibliography

yes

Altmetrics