Wafer-level flame-spray pyrolysis deposition of gas-sensitive layers on microsensors - Research Collection

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Author

Kuehne, S.

Graf, M.

Tricoli, Antonio

Mayer, F.

Pratsinis, Sotiris E.

Date

2008

Type

Journal Article

Citations

Cited 31 times in Web of Science

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1088/0960-1317/18/3/035040

Journal / series

Journal of Micromechanics and Microengineering

Volume

18(3)

Pages / Article No.

035040

Publisher

Institut of Physics

Organisational unit

03684 - Hierlemann, Andreas / Hierlemann, Andreas
03510 - Pratsinis, Sotiris E. / Pratsinis, Sotiris E.

Notes

Received 18 July 2007, In final form 15 January 2008, Published 20 February 2008.

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Citations

Cited 31 times in Web of Science

ETH Bibliography

yes

Altmetrics