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dc.contributor.author
Sonnenfeld, A.
dc.contributor.author
Tun T.M.
dc.contributor.author
Zajickova, L.
dc.contributor.author
Wagner, H.-E.
dc.contributor.author
Behnke, J.F.
dc.contributor.author
Hippler, R.
dc.contributor.editor
Bouchoule, A.
dc.contributor.editor
Pouvesle, Thomann, J.M.
dc.contributor.editor
Bauchire, J.M.
dc.contributor.editor
Robert, E.
dc.date.accessioned
2017-06-11T16:17:36Z
dc.date.available
2017-06-11T16:17:36Z
dc.date.issued
2001
dc.identifier.uri
http://hdl.handle.net/20.500.11850/98423
dc.language.iso
en
dc.publisher
Gremi, CNRS/University of Orléans
dc.title
The decomposition process on silicon-organic compounds (HMDSO, TEOS) in two different types of an atmospheric barrier discharge
dc.type
Conference Paper
ethz.book.title
Proceedings of 14th International Symposium on Plasma Chemistry (ISPC14)
ethz.pages.start
1835
ethz.pages.end
1840
ethz.event
14th International Symposium on Plasma Chemistry (ISPC15)
ethz.event.location
Orléans, France
ethz.event.date
July 9-13, 2001
ethz.notes
.
ethz.publication.place
Orléans, France
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-11T16:17:48Z
ethz.source
ECIT
ethz.identifier.importid
imp593652f49960d78259
ethz.ecitpid
pub:153900
ethz.eth
yes
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-12T17:15:10Z
ethz.rosetta.lastUpdated
2019-02-02T06:57:29Z
ethz.rosetta.versionExported
true
ethz.COinS
ctx_ver=Z39.88-2004&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.atitle=The%20decomposition%20process%20on%20silicon-organic%20compounds%20(HMDSO,%20TEOS)%20in%20two%20different%20types%20of%20an%20atmospheric%20barrier%20discharge&rft.date=2001&rft.spage=1835&rft.epage=1840&rft.au=Sonnenfeld,%20A.&Tun%20T.M.&Zajickova,%20L.&Wagner,%20H.-E.&Behnke,%20J.F.&rft.genre=proceeding&rft.btitle=Proceedings%20of%2014th%20International%20Symposium%20on%20Plasma%20Chemistry%20(ISPC14)
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