The barrier discharge

Basic properties and applications to surface treatment
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Author
Wagner, H.-E.
Brandenburg, R.
Kozlov, K.V.
Sonnenfeld, A.
Michel, P.
Behnke, J.F.
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Date
2003
Type
    Conference Paper
Publication status
published
External links
Journal / series
Vacuum
Volume
71(3)
Pages / Article No.
417 - 417
Publisher
Elsevier
Event
Symposium on Plasma Surface Engineering at the Spring Meeting of the German Physical Society, Regensburg, Germany, March 11-15, 2002
Subject
Barrier discharge; Non-equilibrium plasma; Cross-correlation spectroscopy; Atmospheric pressure glow discharge; Plasma chemistry; Surface treatment; Layer deposition
Organisational unit
03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)  
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