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dc.contributor.author
Wagner, H.-E.
dc.contributor.author
Brandenburg, R.
dc.contributor.author
Kozlov, K.V.
dc.contributor.author
Sonnenfeld, A.
dc.contributor.author
Michel, P.
dc.contributor.author
Behnke, J.F.
dc.date.accessioned
2017-06-11T16:17:37Z
dc.date.available
2017-06-11T16:17:37Z
dc.date.issued
2003
dc.identifier.issn
0042-207X
dc.identifier.other
10.1016/S0042-207X(02)00765-0
dc.identifier.uri
http://hdl.handle.net/20.500.11850/98425
dc.language.iso
en
dc.publisher
Elsevier
dc.subject
Barrier discharge
dc.subject
Non-equilibrium plasma
dc.subject
Cross-correlation spectroscopy
dc.subject
Atmospheric pressure glow discharge
dc.subject
Plasma chemistry
dc.subject
Surface treatment
dc.subject
Layer deposition
dc.title
The barrier discharge
dc.type
Conference Paper
ethz.title.subtitle
Basic properties and applications to surface treatment
ethz.journal.title
Vacuum
ethz.journal.volume
71
ethz.journal.issue
3
ethz.journal.abbreviated
Vacuum
ethz.pages.start
417
ethz.pages.end
417
ethz.event
Symposium on Plasma Surface Engineering at the Spring Meeting of the German Physical Society
ethz.event.location
Regensburg, Germany
ethz.event.date
March 11-15, 2002
ethz.notes
.
ethz.identifier.nebis
000040943
ethz.publication.place
Kidlington
ethz.publication.status
published
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02130 - Dep. Maschinenbau und Verfahrenstechnik / Dep. of Mechanical and Process Eng.::02629 - Institut für Verfahrenstechnik / Institute of Process Engineering::03348 - Rudolf von Rohr, Philipp (emeritus) / Rudolf von Rohr, Philipp (emeritus)
ethz.date.deposited
2017-06-11T16:17:48Z
ethz.source
ECIT
ethz.identifier.importid
imp593652f4a097075555
ethz.ecitpid
pub:153902
ethz.eth
no
ethz.availability
Metadata only
ethz.rosetta.installDate
2017-07-18T08:58:47Z
ethz.rosetta.lastUpdated
2019-02-02T06:57:32Z
ethz.rosetta.versionExported
true
ethz.COinS
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