AlN/Si3N4 multilayers as an interface model system for Al-1 (-) xSixN/Si3N4 nanocomposite thin films
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Date
2015-01-15Type
- Journal Article
ETH Bibliography
yes
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Publication status
publishedExternal links
Journal / series
Surface and Coatings TechnologyVolume
Pages / Article No.
Publisher
ElsevierSubject
Transparent Al-Si-N coatings; Epitaxial AIN/Al2O3; TEMMore
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ETH Bibliography
yes
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