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dc.contributor.author
Wyrsch, Nicolas
dc.contributor.author
Miazza, Clément
dc.contributor.author
Dunand, Sylavain
dc.contributor.author
Shah, Arvind Victor
dc.contributor.author
Blanc, Nicolas
dc.contributor.author
Kaufmann, Rolf
dc.contributor.author
Cavalier, Lionel
dc.contributor.author
Anelli, Giovanni
dc.contributor.author
Despeisse, Matthieu
dc.contributor.author
Jarron, Pierre
dc.contributor.author
Moraes, Danielle
dc.contributor.author
Sirvent, A.G.
dc.contributor.author
Dissertori, Günther
dc.contributor.author
Viertel, Gert
dc.date.accessioned
2021-10-25T11:20:32Z
dc.date.available
2017-06-11T16:26:00Z
dc.date.available
2021-03-24T13:52:39Z
dc.date.available
2021-10-25T11:20:32Z
dc.date.issued
2003
dc.identifier.issn
0272-9172
dc.identifier.other
10.1557/PROC-762-A18.14
en_US
dc.identifier.uri
http://hdl.handle.net/20.500.11850/98751
dc.description.abstract
Integrated imaging and particle sensors have been developed using thin-film on ASIC technology. For this purpose, hydrogenated amorphous silicon diodes, in various configurations, have been optimized for imaging and direct particle detection. These devices were first deposited on glass substrates and later on CMOS readout chips. With an optimization of the material properties and of the diode, a dark current of 1 pA/cm2 could be achieved on p-i-n structures at reverse bias voltage of 1 V. CMOS imagers, incorporating these optimized diodes were then fabricated and characterized. Very thick diodes (with thicknesses up to 50 μm) were also optimized and deposited on glass and on CMOS readout chips. Particle detectors in TFA technology with 12 and 30 μm a-Si:H n-i-p diodes have been fabricated and characterized using light pulse illumination. Direct detection of single low-energy beta particles has been demonstrated.
en_US
dc.language.iso
en
en_US
dc.publisher
Materials Research Society
en_US
dc.title
Development of Vertically Integrated Imaging and Particle Sensors
en_US
dc.type
Conference Paper
dc.date.published
2011-02-01
ethz.journal.title
Materials Research Society Symposium Proceedings
ethz.journal.volume
762
en_US
ethz.journal.abbreviated
Mater. Res. Soc. symp. proc.
ethz.pages.start
205
en_US
ethz.pages.end
210
en_US
ethz.event
2003 MRS Spring Meeting - Symposium A – Amorphous and Nanocrystalline Silicon-Based Films
en_US
ethz.event.location
San Francisco, CA, USA
en_US
ethz.event.date
April 21-25, 2003
en_US
ethz.publication.place
San Francisco, CA
en_US
ethz.publication.status
published
en_US
ethz.leitzahl
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02010 - Dep. Physik / Dep. of Physics::02532 - Institut für Teilchen- und Astrophysik / Inst. Particle Physics and Astrophysics::03593 - Dissertori, Günther / Dissertori, Günther
en_US
ethz.leitzahl.certified
ETH Zürich::00002 - ETH Zürich::00012 - Lehre und Forschung::00007 - Departemente::02010 - Dep. Physik / Dep. of Physics::02532 - Institut für Teilchen- und Astrophysik / Inst. Particle Physics and Astrophysics::03593 - Dissertori, Günther / Dissertori, Günther
ethz.date.deposited
2017-06-11T16:26:42Z
ethz.source
ECIT
ethz.identifier.importid
imp593652fb2267c29000
ethz.ecitpid
pub:154516
ethz.eth
yes
en_US
ethz.availability
Metadata only
en_US
ethz.rosetta.installDate
2017-07-17T08:37:11Z
ethz.rosetta.lastUpdated
2022-03-29T14:28:01Z
ethz.rosetta.versionExported
true
ethz.COinS
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