Single-digit-resolution nanopatterning with extreme ultraviolet light for the 2.5 nm technology node and beyond - Research Collection

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Author

Date

2015-03

Type

Journal Article

Citations

Cited 85 times in Scopus

ETH Bibliography

yes

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Publication status

published

External links

https://doi.org/10.1039/c4nr07420c

Journal / series

Nanoscale

Volume

7(9)

Pages / Article No.

4031 - 4037

Publisher

Royal Society of Chemistry

Notes

Received 16 December 2014, Accepted 24 January 2015, Published online 26 January 2015.

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Citations

Cited 85 times in Scopus

ETH Bibliography

yes

Altmetrics