Properties of reactively sputtered amorphous Zn₃P₂ thin films
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Date
1993
Publication Type
Doctoral Thesis
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published
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Examiner : Wachter, Peter
Examiner : Würfel, Peter
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ETH Zürich
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ERZEUGUNG DÜNNER SCHICHTEN (PHYSIK VON MOLEKULARSYSTEMEN); REAKTIVE MOLEKÜLSTREUUNG (MOLEKÜLPHYSIK); ZINKPHOSPHID (ANORGANISCHE CHEMIE); AMORPHER ZUSTAND (CHEMIE UND PHYSIK); IONENSPUTTERING (ELEKTRODYNAMIK); PRODUCTION OF THIN FILMS (PHYSICS OF MOLECULAR SYSTEMS); REACTIVE MOLECULAR SCATTERING (MOLECULAR PHYSICS); ZINC PHOSPHIDE (INORGANIC CHEMISTRY); AMORPHOUS STATE OF SUBSTANCE (CHEMISTRY AND PHYSICS); ION SPUTTERING (ELECTRODYNAMICS)
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Notes
Diss. Naturwiss. ETH Zürich, Nr. 10425, 1993. Ref.: P. Wachter ; Korref.: P. Würfel ; Korref.: H. von Känel.