Magnetically actuated CMOS resonant cantilever gas sensor for volatile organic compounds
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Author / Producer
Date
2003
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Digest of technical papers / Transducers’03 Boston
Journal / series
Volume
Pages / Article No.
1355 - 1358
Publisher
IEEE
Event
12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas
Notes
Published online 4 August 2003.