A Multilevel CMOS-MEMS Design Methodology Based on Response Surface Models
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Date
2011-06
Publication Type
Journal Article
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yes
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published
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Journal / series
Volume
20 (3)
Pages / Article No.
609 - 621
Publisher
IEEE
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Software
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Subject
Bottom-up and top-down design methodology; Complementary metal-oxide-semiconductor (CMOS); Fingerprint sensor; Microelectromechanical systems (MEMS); Multilevel; Response surface model (RSM); System performance
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Notes
Manuscript received 25 March 2010, Revised 22 January 2011, Accepted 27 February 2011, Date of publication 11 May 2011, Date of current version 2 June 2011.