Monolithically fabricated microgripper with integrated force sensor for manipulating microobjects and biological cells aligned in an ultrasonic field
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Author / Producer
Date
2007
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
16 (1)
Pages / Article No.
7 - 15
Publisher
IEEE
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Capacitive force sensor; Electrostatic microgripper; Force feedback; Handling biological cells; HeLa cancer cells; Microeletromechanical systems (MEMS); Micromanipulation; Silicon-on-insulator (SOI) fabrication; Ultrasonic positioning
Organisational unit
03307 - Dual, Jürg (emeritus) / Dual, Jürg (emeritus)
03627 - Nelson, Bradley J. / Nelson, Bradley J.
Notes
Manuscript received January 9 2006, Revised August 7 2006.