At-wavelength metrology using the moire fringe analysis method based on a two dimensional grating interferometer


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Date

2013-05

Publication Type

Journal Article

ETH Bibliography

yes

Citations

Altmetric
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Data

Rights / License

Publication status

published

Editor

Book title

Volume

710

Pages / Article No.

78 - 81

Publisher

Elsevier

Event

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

X-ray; Metrology; FFT; Two dimensional grating interferometer; At-wavelength; Synchrotron radiation

Organisational unit

Notes

Available online 7 November 2012.

Funding

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