At-wavelength metrology using the moire fringe analysis method based on a two dimensional grating interferometer
METADATA ONLY
Loading...
Author / Producer
Date
2013-05
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
METADATA ONLY
Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Volume
710
Pages / Article No.
78 - 81
Publisher
Elsevier
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
X-ray; Metrology; FFT; Two dimensional grating interferometer; At-wavelength; Synchrotron radiation
Organisational unit
Notes
Available online 7 November 2012.