Two-dimensional Dopant Profiling and Imaging of 4H Silicon Carbide Devices by Secondary Electron Potential Contrast


METADATA ONLY
Loading...

Date

2005

Publication Type

Conference Paper

ETH Bibliography

yes

Citations

Altmetric
METADATA ONLY

Data

Rights / License

Publication status

published

Editor

Book title

Volume

45 (9-11)

Pages / Article No.

1499 - 1504

Publisher

Elsevier

Event

16th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

Organisational unit

03228 - Fichtner, Wolfgang (emeritus) check_circle

Notes

Funding

Related publications and datasets