Correlating Raman peak shifts with phase transformation and defect densities
A comprehensive TEM and Raman study on silicon
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Author / Producer
Date
2009
Publication Type
Journal Article
ETH Bibliography
yes
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Altmetric
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Rights / License
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Publication status
published
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Book title
Journal / series
Volume
40 (6)
Pages / Article No.
679 - 686
Publisher
Wiley
Event
Edition / version
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Software
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Date collected
Date created
Subject
Raman microscopy; focused ion beam; ion implantation; defect density; transmission electron microscopy
Organisational unit
03692 - Spolenak, Ralph / Spolenak, Ralph
Notes
Received 8 August 2008, Accepted 2 December 2008, Published Online 27 February 2009.