Fluorine clustering and diffusion in silicon
Ab initio calculations and kinetic Monte Carlo model
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Author / Producer
Date
2010
Publication Type
Conference Paper
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yes
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published
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Journal / series
Volume
28 (1)
Pages / Article No.
Publisher
American Institute of Physics
Event
International Workshop on Insight in Semiconductor Device Fabrication, Metrology, and Modeling 2009 (INSIGHT 2009)
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Subject
ab initio calculations; boron; diffusion; elemental semiconductors; fluorine; Monte Carlo methods; silicon
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Notes
Received 10 June 2009, Accepted 29 September 2009, Published 3 March 2010.