Controlling the nanostructure and stability of a-C:H:N plasma polymers
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Author / Producer
Date
2015
Publication Type
Journal Article
ETH Bibliography
yes
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Altmetric
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Publication status
published
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Book title
Journal / series
Volume
581
Pages / Article No.
2 - 6
Publisher
Elsevier
Event
Edition / version
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Geographic location
Date collected
Date created
Subject
Plasma deposition; Functionalization; Etching; Dyeing; Aging; Fluorocarbon treatment