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Journal of Engineering Materials and Technology
Journal:
Journal of Engineering Materials and Technology
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Abbreviation
J. Eng. Mater. Technol
Publisher
American Society of Mechanical Engineers
Journal Volumes
ISSN
0094-4289
1528-8889
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Ellis, M.
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Geisberger, A.
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Jungen, A.
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Skidmore, G.
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Tuck, K.
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2005
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A study of creep in polysilicon MEMS devices
Item type:
Journal Article
Tuck, K.
;
Jungen, A.
;
Geisberger, A.
; et al.
(
2005
)
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Journal of Engineering Materials and Technology
Publications
1 - 1 of 1
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