Integrated metal-oxide microsensor array of micro-hotplates with MOS-transistor heater
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Author / Producer
Date
2003
Publication Type
Conference Paper
ETH Bibliography
yes
Citations
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Book title
Eurosensors XVII : the 17th European Conference on Solid-State Transducers
Journal / series
Volume
Pages / Article No.
661 - 662
Publisher
Elsevier
Event
17th European Conference on Solid-State Transducers (Eurosensors XVII)
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Organisational unit
03684 - Hierlemann, Andreas / Hierlemann, Andreas