Improved parameter targeting in 3D-integrated superconducting circuits through a polymer spacer process
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Author / Producer
Date
2024-01-16
Publication Type
Data Collection
ETH Bibliography
yes
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Editor
Contributors
Contact person : Norris, Graham J.
Data collector : Norris, Graham J.
Project leader : Wallraff, Andreas
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Pages / Article No.
Publisher
ETH Zurich
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Methods
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Date collected
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Organisational unit
03720 - Wallraff, Andreas / Wallraff, Andreas
02205 - FIRST-Lab / FIRST Center for Micro- and Nanoscience
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