Multi-degree-of-freedom micropositioning using stepping principles
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Author / Producer
Date
1997
Publication Type
Doctoral Thesis
ETH Bibliography
yes
Citations
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Data
Rights / License
Permanent link
Publication status
published
External links
Editor
Contributors
Examiner : Schweitzer, Gerhard
Book title
Journal / series
Volume
Pages / Article No.
Publisher
ETH Zürich
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
NANOTECHNOLOGIE; MIKROMECHANIK (MASCHINENBAU); MESSTECHNISCHE SONDEN, SENSOREN, DETEKTOREN (PHYSIK); STELLANTRIEBE + STELLEINRICHTUNGEN (AUTOMATISCHE REGELUNG); NANOTECHNOLOGY; MICROMACHINE (MECHANICAL ENGINEERING); MEASURING DEVICES, SENSORS, DETECTORS (PHYSICS); SERVO-DRIVES + ACTUATORS (AUTOMATIC CONTROL)
Organisational unit
Notes
Diss. Techn. Wiss. ETH Zürich, Nr. 12318, 1997. Ref.: G. Schweitzer ; Korref.: R. Y. Siegwart.