Development of silicon microforce sensors integrated with double meander springs for standard hardness test instruments
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Author / Producer
Date
2015
Publication Type
Conference Paper
ETH Bibliography
no
Citations
Altmetric
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Data
Rights / License
Permanent link
Publication status
published
External links
Book title
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems: 4-6 May 2015, Barcelona, Spain
Journal / series
Volume
9517
Pages / Article No.
Publisher
SPIE
Event
Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Microforce sensors; Meander spring; Deep reactive ion etching (DRIE); Piezoresistive Wheatstone bridge; Joining technique
Organisational unit
03388 - Tröster, Gerhard (emeritus)