Ultra-Miniature and Low-Power Pressure Sensors Using Individual Carbon Nanotubes


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Author / Producer

Date

2016-06

Publication Type

Journal Article

ETH Bibliography

yes

Citations

Altmetric
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Data

Rights / License

Publication status

published

Editor

Book title

Volume

25 (3)

Pages / Article No.

422 - 424

Publisher

IEEE

Event

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

Atomic layer deposition; Carbon nanotubes; Pressure sensor; Suspended gate

Organisational unit

03609 - Hierold, Christofer / Hierold, Christofer check_circle

Notes

Published online 9 March 2016, Current Version 30 May 2016.

Funding

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