Ultra-Miniature and Low-Power Pressure Sensors Using Individual Carbon Nanotubes
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Author / Producer
Date
2016-06
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
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Rights / License
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Publication status
published
External links
Editor
Book title
Journal / series
Volume
25 (3)
Pages / Article No.
422 - 424
Publisher
IEEE
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Atomic layer deposition; Carbon nanotubes; Pressure sensor; Suspended gate
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Published online 9 March 2016, Current Version 30 May 2016.