2-D micro particle assembly using atomic force microscope
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Date
1998
Publication Type
Conference Paper
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no
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Abstract
A micro particle manipulation system using atomic force microscope (AFM) as the manipulator has been proposed. The size of the particles to be manipulated are approximately 1-2 /spl mu/m. Optical microscope (OM) is utilized as the vision sensor, and AFM cantilever behaves also as a force sensor which enables contact point detection and surface alignment sensing. A 2D OM real-time image feedback constitutes the main user interface of the directly teleoperated operation system, where the operator uses mouse cursor and keyboard for defining the trajectories for the AFM controller. Particle manipulation experiments are realized for 2.02 /spl mu/m gold-coated latex particles, and it is shown that the system can be utilized in 2-D micro particle assembling.
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published
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Book title
MHS'98: Proceedings of the 1998 International Symposium on Micromechatronics and Human Science
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Pages / Article No.
143 - 148
Publisher
IEEE
Event
1998 International Symposium on Micromechatronics and Human Science (MHS 1998)
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Software
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09726 - Sitti, Metin (ehemalig) / Sitti, Metin (former)