Aperture based Raman spectroscopy on SiGe film structures with high spatial resolution


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Author / Producer

Date

2008

Publication Type

Journal Article

ETH Bibliography

yes

Citations

Altmetric
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Data

Rights / License

Publication status

published

Editor

Book title

Volume

39 (4)

Pages / Article No.

435 - 438

Publisher

Wiley

Event

Edition / version

Methods

Software

Geographic location

Date collected

Date created

Subject

Raman spectroscopy; aperture; strain; silicon - germanium

Organisational unit

03430 - Zenobi, Renato / Zenobi, Renato check_circle

Notes

Received: 5 July 2007, Accepted: 14 September 2007.

Funding

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