Hybrid lithography based fabrication of 3D patterns by deep reactive ion etching
OPEN ACCESS
Loading...
Author / Producer
Date
2019-03-15
Publication Type
Journal Article
ETH Bibliography
yes
Citations
Altmetric
OPEN ACCESS
Data
Permanent link
Publication status
published
External links
Editor
Book title
Journal / series
Volume
209
Pages / Article No.
10 - 15
Publisher
Elsevier
Event
Edition / version
Methods
Software
Geographic location
Date collected
Date created
Subject
Hybrid lithography; Deep reactive ion etching; Pattern Transfer; 3D profile etching; Taper control
Organisational unit
03609 - Hierold, Christofer / Hierold, Christofer
Notes
Funding
153292 - Q-factor enhancement in resonating CNTs (SNF)